EFFECTS OF SUBSTRATE COATING WITH METAL SPRAYING ON RESIDUAL STRESSES IN SPUTTERED TITANIUM-NITRIDE FILMS, Y.Miyoshi, H. Tanabe, T. Takamatsu, T. Sameshima, T. Ejima and K. Ueda, pp. 163-168
نویسندگان
چکیده
A fundamental study on the effect that pre-coating a substrate with metal spraying has on the properties of sputtered Titanium-nitride film (TiN film) was carried out. The residual stresses in TiN films sputtered on the substrates coated with various spray coatings were measured by X-ray stress measurement. It was observed that the residual stresses in TiN films sputtered on substrates coated by metal spraying were lower than those on the substrates not so coated. The influence of the surface configuration of spray coating on the residual stress in sputtered TiN film was also investigated. It was found that the surface configuration of spray coating affected the residual stress in TiN film, and that the residual stress increased with the surface roughness of the spray coating increasing.
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